3D FEM MODELING AND TECHNOLOGY OF PIEZOELECTRIC RING MEMS ANTENNA
نویسندگان
چکیده
منابع مشابه
Tunability of Piezoelectric MEMS Ring Resonator Based Filter
The influence of piezoelectric actuator design on a two-port piezoelectrically transduced micro-electro-mechanical (MEMS) ring resonator frequency tuning performance has been investigated. A cubic silicon carbide (3C-SiC) ring resonator was fabricated with a lead–zirconium–titanate (PZT) piezoelectric actuator and sensor integrated on the surface of the ring. Measurements of the transmission fr...
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ژورنال
عنوان ژورنال: Progress In Electromagnetics Research C
سال: 2011
ISSN: 1937-8718
DOI: 10.2528/pierc11063003